Real-Time Chemical Concentration Measurement for Semiconductor Processes
Semiconductor manufacturing requires the use of high-purity chemicals for cleaning, wet etching, polishing and moulding silicon microchips to prevent microscopic imperfections that can affect chip quality and performance.
The main challenges encountered during chemical production are process control and maintenance of precise chemical concentrations, which can both be addressed by the Vaisala Polaris PR53S Semicon Process Refractometer.
The Vaisala Polaris PR53S Semicon Process Refractometer is designed to provide continuous, inline measurement of chemical concentration for demanding wet-process applications, including blending and chemical mechanical polishing (CMP).
It is now available at ADM Tech, with our product experts on standby should you need to discuss your applications. Contact us at @email for assistance.
Benefits of the Vaisala Polaris PR53S Inline Process Refractometer
The PR53S is a compact refractometer designed specifically for semiconductor liquid chemical applications. It provides real-time concentration measurement directly within chemical distribution systems, wet benches, and integrated process tools.
The PR53S measures the refractive index and incorporates integrated temperature compensation to provide accurate, repeatable, and drift-free results. Continuous concentration monitoring gives process engineers greater visibility of chemical conditions and allows them to respond quickly to changes when required.
The Vaisala Polaris PR53S provides concentration data directly at the point of use, helping semiconductor manufacturers maintain process consistency and reduce reliance on complex and costly analytical systems. Its compact design, accurate measurement and low-maintenance operation make it well suited to monitoring critical wet-process chemistries.
Designed for Demanding Applications
The PR53S incorporates an ultrapure modified PTFE flow cell within a compact design suited to cleanroom environments and tool-integrated installations. It is compatible with a broad range of semiconductor chemistries and slurry applications, with reliable measurement maintained even when bubbles, particles or crystals are present.
The PR53S has no moving parts, reducing maintenance requirements and simplifying servicing.
Vaisala Polaris PR53S: Key Features and Benefits at a Glance
Continuous, real-time chemical concentration measurement
Accurate and repeatable refractive index measurement
Integrated temperature compensation
Ultrapure modified PTFE flow cell
Compact design for cleanroom and process-tool integration
Suitable for chemical blending, cleaning, etching, and CMP applications
No moving parts for minimal maintenance
Standalone operation or integration with Vaisala Indigo transmitters and indicators
Improve Semiconductor Process Control
ADM can assist with Vaisala process measurement solutions for semiconductor and other demanding industrial applications. Contact our team at @email to discuss your chemical concentration measurement requirements, or if you need assistance with your application.
